This Recommended Practice (RP), IEST-RP-NANO-201.1 Measuring and Reporting Vibrations in Advanced-Technology Facilities, establishes guidelines for conducting vibration measurements and reporting data where vibration-sensitive scientific instruments are located in existing or planned advanced technology facilities. This document provides recommendations for conducting site and building vibration measurements to confirm ambient site conditions before and after construction is complete. The document also includes guidelines in selecting suitable instrumentation and hardware for use in vibration measurements; establishing sensitive process tool vibration thresholds; conducting vibration measurements on sites and in facilities; and reporting results of vibration measurements in a uniform and consistent format.
These guidelines are specifically for the following:
a) Selecting suitable instrumentation and hardware for use in vibration measurements
b)Establishing sensitive process tool vibration thresholds
c)Conducting vibration measurements on sites and in facilities
d)Reporting results of vibration measurements in a uniform and consistent format
Some of this vibration-sensitive equipment is used in the manufacture, measurement, and inspection of integrated circuits. Such equipment may be collectively referred to as "process tools" in this RP. Because equipment used in a wide variety of technological applications is sensitive to vibration and sound, it is therefore necessary to establish levels of vibration sensitivity for them and to ensure that vibrations occurring in the facility or at the site at which they are located are below those levels.
First printing, March 2024.
Measuring and Reporting Vibrations in Advanced Technology Facilities was developed by Working Group 201 of the IEST Contamination Control Division (WG-NANO-201).
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