This Recommended Practice (RP), IEST-RP-CC024.1, provides guidelines for conducting vibration measurements and reporting vibration data in environments where vibration control is important. Process tools used in the manufacture, measurement, and inspection of integrated circuits are sensitive to vibration and sound. It is therefore necessary to establish levels of vibration sensitivity for process tools and to ensure that vibrations occurring in the facility or at the site at which they are located are below those levels.
Topics covered include:
a) Selecting suitable instrumentation and hardware for use in vibration measurements.
b) Establishing sensitive process tool vibration thresholds.
c) Conducting vibration measurements on sites and in facilities.
d) Reporting results of vibration measurements in a uniform and consistent format.
This RP is intended to provide guidance for use in the microelectronics industry. However, it may also be applicable in pharmaceutical and biological research, metrology laboratories, and other contexts in which vibration control is important.
Sixth printing, July 2017
Measuring and Reporting Vibration in Microelectronics Facilities was prepared by Working Group 024 of the IEST Contamination Control Division (WG-CC024).
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